This book primarily focuses on the authors research and practical achievements in the field of photonic integrated phased arrays in recent years. Firstly, a comprehensive introduction on the concept, operation principles, and research progress of photonic integrated phased arrays is introduced. Then, detailed explanations of the optical antenna and array design in photonic integrated phased arrays are given. Combined with design cases of siliconbased optical phased arrays with different scales, the design methods for achieving low sidelobes are deeply researched, and the test principle and design of photonic integrated phased arrays are elaborated. Finally, the design, implementation, and test of photonic integrated phased arrays are illustrated through a detailed case study on the development of a siliconbased optical phased array chip and verify its shortdistance space optical communication based on the chip.
This book is dedicated to integrating the theory, design, processing, and test cases of photonic integrated phased arrays, and it provides a valuable reference for researchers and designers in the field of optical phased array technology.

本书首先介绍了光子集成相控阵的概念、工作原理和国内外研究进展，进而对光子集成相控阵中光天线单元和阵列设计进行了详细介绍，结合不同规模的硅基光相控阵设计案例，深入探讨了实现低副瓣的设计方法，阐述了光子集成相控阵的测试原理和测试设计，最后通过硅基光相控阵芯片研发案例详细说明光子集成相控阵的设计、实现与测试，并进行基于硅基光相控阵芯片的短距离空间光通信验证。
本书致力于将理论研究、设计加工和实验验证相融合，希望能够为光相控阵技术领域的研究和设计者提供参考。

Contents
1 Introduction ................................................... 1
1.1 Concept and Defnition of Optical Phased Arrays . . . . . . . . . . . . . . . 1
1.2 Composition of Photonic Integrated Phased Arrays . . . . . . . . . . . . . . 3
1.2.1 OpticalCoupler ...................................... 3
1.2.2 OpticalPower Distribution Networks ................... 5
1.2.3 OpticalPhaseShifters ................................ 6
1.2.4 OpticalAntennaArrays ............................... 12
1.2.5 ControlCircuit ...................................... 14

1.3 BeamSteering Principles of Optical Phased Arrays . . . . . . . . . . . . . 15
1.4 Relationship Between Optical Phased Arrays and Microwave PhasedArrays ............................................. 17
1.5 MainParameters ofOpticalPhasedArrays ..................... 18
1.5.1 Port Characteristics of Optical Antennas . . . . . . . . . . . . . . . . . 18
1.5.2 Radiation Characteristics of Optical Antennas . . . . . . . . . . . . 21
1.6 ApplicationFields ofOpticalPhasedArrays .................... 23

1.7 Research Progress of Photonic Integrated Phased Arrays . . . . . . . . . 25
1.7.1 OneDimensional Optical Phased Arrays . . . . . . . . . . . . . . . . 26
1.7.2 TwoDimensional Optical Phased Arrays . . . . . . . . . . . . . . . . 30
1.7.3 Development Trends of Photonic Integrated Phased Arrays .............................................. 32 References ..................................................... 34
2 Design of Optical Antennas and Arrays .......................... 37
2.1 SiliconBasedGratingNanoantennas .......................... 37
2.1.1 Design of SiliconBased Curved Grating NanoantennasandArrays ............................. 37
2.1.2 Design of Miniaturized SiliconBased Straight GratingNanoantennasandArrays ...................... 46
2.1.3 Design of Antennas for Suppressing Bidirectional Radiation ........................................... 54
2.2 PlasmonicNanoantennas .................................... 59
2.2.1 DesignofPlasmonicNanoantennas ..................... 61
2.2.2 Design of Plasmonic Nanoantenna Arrays . . . . . . . . . . . . . . . 63
2.3 SiliconBasedHornNanoantennas ............................ 69
2.3.1 Design of SiliconBased HPlane Sectoral Horn Nanoantennas ....................................... 69
2.3.2 Design of SiliconBased Pyramidal Horn Nanoantennas ....................................... 71
2.3.3 Design of Miniaturized SiliconBased Horn Nanoantennas ....................................... 73 References ..................................................... 77
3 LowSidelobe Design of Photonic Integrated Phased Arrays ........ 79
3.1 Design Methods of LowSidelobe Optical Phased Arrays . . . . . . . . . 79
3.1.1 DesignMethodsofUniformArrays ..................... 80
3.1.2 DesignMethodsofNonuniformArrays ................. 83

3.2 Design Cases of LowSidelobe Optical Phased Arrays . . . . . . . . . . . 86
3.2.1 LowSidelobeDesignofUniformArrays ................ 86 3.2.2 LowSidelobe Design of Nonuniform Arrays . . . . . . . . . . . . . 92 References ..................................................... 112
4 Test of Photonic Integrated Phased Arrays ....................... 115
4.1 Test for Key Components in Photonic Integrated Phased Arrays .................................................... 115
4.1.1 Radiation Characteristics Test of Optical Antennas . . . . . . . . 115
4.1.2 Phase Shifting Characteristic Test of Optical Phased Shifters ............................................. 119
4.2 Test for Photonic Integrated Phased Array Chips . . . . . . . . . . . . . . . . 126
4.2.1 TestPerformance .................................... 126
4.2.2 TestMethod ......................................... 127
4.2.3 TestSystem ......................................... 129 5 Design of Photonic Integrated Phased Arrays ..................... 135
5.1 1 32 SiliconBased Optical Phased Arrays Based on EndFace Coupling ...................................... 135
5.1.1 DesignScheme ...................................... 135
5.1.2 Radiation Characteristic Test .......................... 139
5.1.3 Comparison Between Simulation and Test . . . . . . . . . . . . . . . 142
5.2 1 64 SiliconBased Optical Phased Arrays Based on VerticalCoupling ........................................ 142
5.2.1 DesignScheme ...................................... 142
5.2.2 Radiation Characteristic Test .......................... 144

5.2.3 Comparison Between Simulation and Test . . . . . . . . . . . . . . . 146
5.3 Packaged 1 128 SiliconBased Optical Phased Arrays Based on VerticalCoupling .................................. 148
5.3.1 DesignScheme ...................................... 148
5.3.2 Radiation Characteristic Test .......................... 150

5.3.3 Comparison Between Simulation and Test . . . . . . . . . . . . . . . 152
5.4 Demonstration and Verifcation of Communication Based onSiliconBasedOpticalPhasedArrays ....................... 153

5.4.1 Demonstration Test of Beam Steering and Switching . . . . . . 155
5.4.2 Demonstration Test of Free Space Optical Communication ...................................... 157